The Development of an Optopiezoelectric Micropump for Microfluidic Applications

Wang, Hsin-Hu ;   Lee, Chih-Kung ;   Hsu, Yu-Hsiang

In this paper, we present a polymer-based piezoelectric micropump that can be selectively activated and controlled by a masked light source. This optopiezoelectric micropump was achieved by changing one of the surface electrode of a piezoelectric thin-film to a photoconductive material, titanium oxide phthalocyanine (TiOPc). This design allowed the piezoelectric pump to be optically controlled through this photoconductive electrode. By using a photomask, different designs of effective surface electrodes can be introduced to optimize the performance. The preliminary data suggested that an optical driven piezoelectric micropump could be realized by applying this hybrid design.