A Fabrication Platform for Stretchable Electronic Medical Devices

Savov, Angel ;   Khoshfetrat Pakazad, Saeed ;   Joshi, Shivani ;   Henneken, Vincent ;   Dekker, Ronald

A CMOS compatible post-processing technology for the fabrication of high-density stretchable electronic circuits is demonstrated. The technology allows for the fabrication of medical devices that have to conform to the human body. The circuits consist of an array of small rigid islands that are attached to a stretchable substrate. The islands are electrically connected by fine-pitch, free-standing interconnects, which are fabricated in the CMOS interconnect stack. This allows for a high interconnect density in combination with a high degree of overall stretchability.