Temperature Dependence of Scanning Angle Frequency Response of Electrostatic Comb-Actuated Micro-Scanner

Ikeda, Kentaro ;   Okazaki, Koji ;   Ishikawa, Noriaki ;   Sawada, Renshi

We have investigated the temperature dependence of scanning angle frequency response of the electrostatic comb-actuated micro-scanner with the aim of maintaining the scanning angle of it. The scanning angle frequency response of the micro-scanner shifted to lower frequency side with a rise of temperature. In addition, the amount of change of the scanning angle due to temperature was about 2deg. It is considered that we can maintain the scanning angle by controlling the input voltage to the micro-scanner.