3D Microelectrodes on Chip for Impedance-Based Cell Detection and Differentiation

Rollo, Enrica ;   Wilhelm, Jannick ;   Guiducci, Carlotta

In this work we show single-particle differentiation in flow based on size and cell state by means of on-chip 50 µm high 3D silicon micropillar electrodes. The high conductivity of the electrode material, the deployment of a facing-electrode configuration and the excellent regularity of the 3D shapes enable highly efficient single particle characterization by impedance measurements.