Temperature Dependence of Scanning Angle Frequency Response of Electrostatic Comb-Actuated Micro-Scanner

Ikeda, Kentaro ;   Okazaki, Koji ;   Ishikawa, Noriaki ;   Sawada, Renshi

Tags BioMEMSNanotechnology

We have investigated the temperature dependence of scanning angle frequency response of the electrostatic comb-actuated micro-scanner...

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